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For example, TOP precision processing of a SiC adsorption plate for a semiconductor manufacturing apparatus is a disk-shaped member having a diameter of 290 mm and a thickness of 10 mm, and has 10 concentric groove grooves (width 1 mm) on the surface. Moreover, the Vickers hardness of SiC is very high, 1.3 times that of Al2O3. When machining such a difficult-to-cut material with a machining center (MC), a very fine and high-rigidity drill bit coated with diamond on a super-hard alloy is generally used. This very fine drill bit is not durable, although it is very rigid. Therefore, TOP Seiko has developed a method that can make the tool durable and cut the groove in a short time. The key is to make the tool. The company made two knives with rectangular (800 μm width) diamond pieces on the bottom of the open disc-shaped part. By rotating the tool on the MC, a circular groove can be cut into the workpiece.
In addition to ceramics, TOP Seiko also processes metals such as W and Mo. In these metal processing, unusual methods are often used. For example, when a rod feeder is used to supply a Mo rod to an NC lathe, it is processed in hundreds of units at a time, and such processing is performed by a self-made cutter. By extending the tool life, the Mo workpiece is unmanned for 40 to 50 hours. In addition, there is a method of clamping the W sheet without using a chuck and fixing it to the jig with an adhesive. This method can use the entire sheet as a base material without leaving the portion held by the chuck.
According to reports, TOP Seiko can achieve difficult machining operations in a short period of time. In addition to the company's accumulated 12 years of processing experience, when encountering difficult machining operations, it is usually the operator and all the staff on site. Try "looping." This cycle is: first, observe the phenomenon before, during and after processing; second, make assumptions based on the observation results; third, verify the hypothesis through actual processing. Through repeated observations and trial and error, the company has been able to create some processing methods that are contrary to common sense.
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Cycle experiment, the Japanese enterprise finally broke the hard and brittle material problem
Abstract Based on multi-party news, Japan TOP Seiko (TOPSEIKO) is a well-received company specializing in the cutting of "hard and brittle" difficult materials. The company's processing materials include alumina (Al2O3), silicon carbide (...
Comprehensive multi-party news, Japan TOP Seiko (TOP SEIKO) is a well-received company specializing in cutting "hard and brittle" difficult materials, the company's processing materials include alumina (Al2O3), silicon carbide (SiC) and other ceramics Materials, as well as hard and brittle pure tungsten (W) and pure molybdenum (Mo) in metals. In terms of the amount of products processed by the company, ceramics include wafer adsorption plates for semiconductor manufacturing equipment, shower plates for CVD (Chemical Vapor Deposition) devices, etc. Metals have industrial applications for processing radiation and X-rays. Metal parts of medical inspection equipment, etc. The company is able to achieve high-precision machining of difficult-to-machine materials in a short period of time.